LSMCVD 공정으로 제조한 BST 박막의 저온 결정화 및 박막에 대한 열처리 조건과 용매의 영향Crystallization at low temperature of BST thin films prepared by LSMCVD, and effects of heat treatment and solvent on the films

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dc.contributor.advisor양승만-
dc.contributor.advisor박승빈-
dc.contributor.advisorYang, Seung-Man-
dc.contributor.advisorPark, Seung-Bin-
dc.contributor.author박진-
dc.contributor.authorPark, Jin-
dc.date.accessioned2011-12-13T01:50:26Z-
dc.date.available2011-12-13T01:50:26Z-
dc.date.issued1998-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=133653&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/29603-
dc.description학위논문(석사) - 한국과학기술원 : 화학공학과, 1998.2, [ viii, 76 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject결정화-
dc.subjectdpm-
dc.subjectLSMCVD-
dc.subjectBST-
dc.subjectCristallization-
dc.subjectdpm-
dc.subject액적화학증착법-
dc.subject티탄산바륨스트론튬-
dc.titleLSMCVD 공정으로 제조한 BST 박막의 저온 결정화 및 박막에 대한 열처리 조건과 용매의 영향-
dc.title.alternativeCrystallization at low temperature of BST thin films prepared by LSMCVD, and effects of heat treatment and solvent on the films-
dc.typeThesis(Master)-
dc.identifier.CNRN133653/325007-
dc.description.department한국과학기술원 : 화학공학과, -
dc.identifier.uid000963267-
dc.contributor.localauthor양승만-
dc.contributor.localauthor박승빈-
dc.contributor.localauthorYang, Seung-Man-
dc.contributor.localauthorPark, Seung-Bin-
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CBE-Theses_Master(석사논문)
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