학위논문(박사) - 한국과학기술원 : 신소재공학과, 2019.8,[viii, 120 p. :]
Oxide thin film transistor▼aatomic layer deposition method▼ahydrogen▼arapid thermal process▼alight annealing; 산화물 박막 트랜지스터▼a원자층 증착법▼a수소▼a급속 열처리 장비▼a광열처리
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