Despite the excellent electrical conductivity of metal thin film electrodes, their poor mechanical stretchability makes it extremely difficult to apply them as stretchable interconnect electrodes. Thus, we propose a novel stretchable hybrid electrode (SHE) by adopting two strategies to overcome the metal thin film electrode limitations: grain size engineering and hybridization with conductive interlayers. The grain size engineering technique improves the inherent metal thin film stretchability according to the Hall-Petch theory, and the hybridization of the conductive interlayer materials, poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) and carbon nanotube (CNT), suppresses crack propagation. Especially, the CNT-inserted SHE exhibits a decreased resistance change of approximately 32% in tensile test and 75% in a 10 000 cycle fatigue test because of the rough surface of the designed electrode, which relieves maximum stress by redistributing it more evenly to prevent penetrating crack propagation.