Micromachined piezoelectric membrane acoustic device

Abstract

This paper reports on a 3 mm x 3 mm x 0.003 mm piezoelectric membrane acoustic device, which works as a microphone and a microspeaker. It has a 0.5 mum thick zinc oxide (ZnO) piezoelectric thin film on a 1.5 mum thick low-stress silicon nitride membrane, made of LPCVD. The maximum deflection in the center of membrane, using laser Doppler vibrometer (LDV), is 1 mum at 7.3 kHz with input drive 15 V0-P (zero-peak). The output sound pressure level (SPL) of microspeaker is 76.3 dB SPL at 7.3 kHz, and 83.1 dB SPL at 13.3 kHz with input drive 15 V0-P. The distance between the reference microphone and piezoelectric microspeaker is 1 cm. The sensitivity of the microphone is 0.51 mV/Pa at 7.3 kHz with noise level of 18 dB SPL. (C) 2003 Elsevier Science B.V. All rights reserved.