Micromachined piezoelectric membrane acoustic device

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dc.contributor.authorKim, YCko
dc.contributor.authorLee, Seung Seobko
dc.contributor.authorChoi, SHko
dc.contributor.authorKim, SRko
dc.contributor.authorKo, SCko
dc.date.accessioned2008-01-14T08:53:53Z-
dc.date.available2008-01-14T08:53:53Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2003-01-
dc.identifier.citationSENSORS AND ACTUATORS A-PHYSICAL, v.103, no.1-2, pp.130 - 134-
dc.identifier.issn0924-4247-
dc.identifier.urihttp://hdl.handle.net/10203/2742-
dc.description.abstractThis paper reports on a 3 mm x 3 mm x 0.003 mm piezoelectric membrane acoustic device, which works as a microphone and a microspeaker. It has a 0.5 mum thick zinc oxide (ZnO) piezoelectric thin film on a 1.5 mum thick low-stress silicon nitride membrane, made of LPCVD. The maximum deflection in the center of membrane, using laser Doppler vibrometer (LDV), is 1 mum at 7.3 kHz with input drive 15 V0-P (zero-peak). The output sound pressure level (SPL) of microspeaker is 76.3 dB SPL at 7.3 kHz, and 83.1 dB SPL at 13.3 kHz with input drive 15 V0-P. The distance between the reference microphone and piezoelectric microspeaker is 1 cm. The sensitivity of the microphone is 0.51 mV/Pa at 7.3 kHz with noise level of 18 dB SPL. (C) 2003 Elsevier Science B.V. All rights reserved.-
dc.languageEnglish-
dc.language.isoen_USen
dc.publisherELSEVIER SCIENCE SA-
dc.titleMicromachined piezoelectric membrane acoustic device-
dc.typeArticle-
dc.identifier.wosid000180418200018-
dc.identifier.scopusid2-s2.0-0037438989-
dc.type.rimsART-
dc.citation.volume103-
dc.citation.issue1-2-
dc.citation.beginningpage130-
dc.citation.endingpage134-
dc.citation.publicationnameSENSORS AND ACTUATORS A-PHYSICAL-
dc.identifier.doi10.1016/S0924-4247(02)00310-2-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthorLee, Seung Seob-
dc.contributor.nonIdAuthorKim, YC-
dc.contributor.nonIdAuthorChoi, SH-
dc.contributor.nonIdAuthorKim, SR-
dc.contributor.nonIdAuthorKo, SC-
dc.type.journalArticleArticle; Proceedings Paper-
dc.subject.keywordAuthorZnO piezoelectric thin film-
dc.subject.keywordAuthormembrane-
dc.subject.keywordAuthormicrophone-
dc.subject.keywordAuthormicrospeaker-
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