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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Capacitive Sensing Type SUrface Micromachined Silicon Accelerometer with Stiffness Tuning Capability

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Park, K.Y. / Lee, Chong-Wonresearcher / Jang, H.S. / Oh, Y.S. / Ha, B.J.
Issue Date
1998-01
Language
ENG
Citation

Int. Workshop on Micro Electro Mechanical Systems(MEMS98)

URI
http://hdl.handle.net/10203/2735
Appears in Collection
ME-Conference Papers(학술회의논문)
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