Two-point Diffraction Interferometer for Absolute Distance Measurement

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We describe a novel method of measuring absolute distances by using a two-point diffraction source specially devised to generate two high quality spherical waves simultaneously with a small lateral offset. Interference of the generated two spherical waves produces a unique ellipsoidal phase distribution in the measurement space. A partial map of the resulted interference phase field is sampled and fitted to a geometric model of multilateration that allows absolute-distance measurements to be performed without 2π-ambiguity. The partial phase map may be obtained by use of either homodyne or heterodyne phase measuring technique. Test results demonstrate that high precision with 1 part in 106 uncertainty can be achieved over 1 meter distance range.
Publisher
SPIE
Issue Date
2004-08
Language
English
Citation

Optical Science and Technology, the SPIE 49th Annual Meeting, 2004

DOI
10.1117/12.558834
URI
http://hdl.handle.net/10203/273308
Appears in Collection
ME-Conference Papers(학술회의논문)
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