The comparison of optical sources for surface metrology
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, Jiyong | ko |
| dc.contributor.author | Lu, Y | ko |
| dc.contributor.author | Kim, S | ko |
| dc.contributor.author | KIM, Young-Jin | ko |
| dc.contributor.author | 김승우 | ko |
| dc.date.accessioned | 2020-03-19T04:31:29Z | - |
| dc.date.available | 2020-03-19T04:31:29Z | - |
| dc.date.created | 2019-12-27 | - |
| dc.date.issued | 2016-03 | - |
| dc.identifier.citation | Proceedings of Korean Society of Precision Engineering Spring Conference, 2016 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/273085 | - |
| dc.publisher | Korean Society of Precision Engineering | - |
| dc.title | The comparison of optical sources for surface metrology | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | Proceedings of Korean Society of Precision Engineering Spring Conference, 2016 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.contributor.localauthor | 김승우 | - |
| dc.contributor.nonIdAuthor | Lu, Y | - |
| dc.contributor.nonIdAuthor | Kim, S | - |
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