DSpace at KOASAS: Scheduling of Dual-armed Cluster Tools with k-periodic Chamber Cleaning

DSpace at KOASAS

College of Engineering(공과대학)Dept. of Industrial and Systems Engineering(산업및시스템공학과)IE-Conference Papers(학술회의논문)

Scheduling of Dual-armed Cluster Tools with k-periodic Chamber Cleaning

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LEE, TAE GYUNG / Lee, Tae-Eog researcher

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Publisher: 대한산업공학회

Issue Date: 2018-11-09

Citation: 2018 대한산업공학회 추계학술대회, pp.747 - 777

URI: http://hdl.handle.net/10203/272529

Appears in Collection: IE-Conference Papers(학술회의논문)

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