Scheduling of Dual-armed Cluster Tools with k-periodic Chamber Cleaning
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | LEE, TAE GYUNG | ko |
| dc.contributor.author | Lee, Tae-Eog | ko |
| dc.date.accessioned | 2020-03-19T01:40:18Z | - |
| dc.date.available | 2020-03-19T01:40:18Z | - |
| dc.date.created | 2019-11-20 | - |
| dc.date.issued | 2018-11-09 | - |
| dc.identifier.citation | 2018 대한산업공학회 추계학술대회, pp.747 - 777 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/272529 | - |
| dc.description.abstract | 등록된 정보가 없습니다. | - |
| dc.publisher | 대한산업공학회 | - |
| dc.title | Scheduling of Dual-armed Cluster Tools with k-periodic Chamber Cleaning | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 747 | - |
| dc.citation.endingpage | 777 | - |
| dc.citation.publicationname | 2018 대한산업공학회 추계학술대회 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.contributor.localauthor | Lee, Tae-Eog | - |
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