Precise and large-dynamic-range surface profilometry using time-of-flight detection of femtosecond optical pulses

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dc.contributor.authorNa, Yongjinko
dc.contributor.authorLu, Xingko
dc.contributor.authorJeon, Chan-Giko
dc.contributor.authorShi, Kebinko
dc.contributor.authorKim, Jungwonko
dc.date.accessioned2020-01-20T08:20:18Z-
dc.date.available2020-01-20T08:20:18Z-
dc.date.created2020-01-20-
dc.date.created2020-01-20-
dc.date.created2020-01-20-
dc.date.created2020-01-20-
dc.date.issued2019-02-05-
dc.identifier.citationLaser 3D Manufacturing VI Conference-
dc.identifier.urihttp://hdl.handle.net/10203/271600-
dc.description.abstractWe demonstrate a new precise TOF detection-based surface profilometry technique by utilizing FLOM-PD's sub-fs resolution electro-optic sampling between an optical pulse train and a microwave signal. The imaging can be realized by scanning the sample's position laterally, as a scanning LIDAR system does. Using this technique, three samples of different step heights are successfully imaged. Our method achieves high precision of 4.2 nm repeatability and large maximum detectable range of 9.1 mm NAR, and accordingly, dynamic range is larger than 120 dB.-
dc.languageEnglish-
dc.publisherSPIE-
dc.titlePrecise and large-dynamic-range surface profilometry using time-of-flight detection of femtosecond optical pulses-
dc.typeConference-
dc.identifier.wosid000481656000021-
dc.identifier.scopusid2-s2.0-85067672226-
dc.type.rimsCONF-
dc.citation.publicationnameLaser 3D Manufacturing VI Conference-
dc.identifier.conferencecountryUS-
dc.identifier.conferencelocationThe Moscone center, San Francisco-
dc.identifier.doi10.1117/12.2508242-
dc.contributor.localauthorKim, Jungwon-
dc.contributor.nonIdAuthorNa, Yongjin-
dc.contributor.nonIdAuthorLu, Xing-
dc.contributor.nonIdAuthorJeon, Chan-Gi-
dc.contributor.nonIdAuthorShi, Kebin-
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ME-Conference Papers(학술회의논문)
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