학위논문(석사) - 한국과학기술원 : 신소재공학과, 2018.8,[v, 49 p. :]
Oxide thin film transistor▼aIn-Ga-Zn-O▼aBack channel etched structure▼aCu diffusion barrier material▼amolybdenum-based alloy▼aetching residue; 산화물 박막 트랜지스터▼a인듐-갈륨-아연 산화물▼a백채널 에치 구조▼a구리 확산 방지 물질▼a몰리브덴 합금▼a식각 잔여물
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