High Speed Micro Positioning System Based on Coarse/Fine Pair Control

Abstract

A coarse/fine pair control system is suggested to relieve the difficulty of obtaining high accuracy over a large movement. A coarse actuator which is capable of high force in a large working range is developed using electromagnetic principle. A fine actuator having a high accuracy is introduced using a piezoeletric material. The coarse/fine actuator pair system is applied to magneto-optical (MO) disk drives to enhance the system's performance in terms of speed and accuracy.