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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

국소적 열수화학반응을 이용한 금속산화 나노구조물의 선택적 합성 및 마이크로 디바이스에의 집적방법

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박인규researcher / 고승환 / A. P. Pisano / C. P. Grigoropoulos / Z. Li
Publisher
11th Korea MEMS Conference 2009
Issue Date
2009-04
Language
Korean
Citation

11th Korea MEMS Conference 2009

URI
http://hdl.handle.net/10203/260340
Appears in Collection
ME-Conference Papers(학술회의논문)
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