DSpace at KOASAS: High-Resolution and Low-cost Ag photomask Fabrication by Using Laser Direct Patterning Method

DSpace at KOASAS

College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

High-Resolution and Low-cost Ag photomask Fabrication by Using Laser Direct Patterning Method

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Yang, Min-Yang researcher / Youn, Jin-Ho / Park, Jung-Hwan / Kang, Bong-Chul

Publisher: 한국생산제조시스템학회

Issue Date: 2012-10

Language: English

Citation: ICMTE(International Conference of Manufacturing Technology Engineers) 2012, Seoul, Korea

URI: http://hdl.handle.net/10203/259443

Appears in Collection: ME-Conference Papers(학술회의논문)

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High-Resolution and Low-cost Ag photomask Fabrication by Using Laser Direct Patterning Method

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