DSpace at KOASAS: Performance Comparison of Wet-Etched and Dry-Etched Geiger-mode Avalanche Photodiodes Using a Single Diffusion Process

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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Performance Comparison of Wet-Etched and Dry-Etched Geiger-mode Avalanche Photodiodes Using a Single Diffusion Process

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Lee, Ki Won / Yang, Kyounghoon researcher

Publisher: International Symposium on Compound Semiconductors

Issue Date: 2013-05-23

Language: English

Citation: 40th International Symposium on Compound Semiconductors

DOI: 10.1002/pssc.201300178

URI: http://hdl.handle.net/10203/258412

Appears in Collection: EE-Conference Papers(학술회의논문)

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Performance Comparison of Wet-Etched and Dry-Etched Geiger-mode Avalanche Photodiodes Using a Single Diffusion Process

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