Characterization of Ultra-Thin Dielectric Using Time Domain Reflectometry

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Publisher
The Japan Society of Applied Physics
Issue Date
2013-11-08
Language
English
Citation

International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES - SCIENCE AND TECHNOLOGY - (IWDTF), pp.113 - 114

URI
http://hdl.handle.net/10203/256397
Appears in Collection
EE-Conference Papers(학술회의논문)
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