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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
펄스 마그테트론 스퍼터링 소스의 플라즈마 특성과 증착율에 대한 연구 = Characteristics of plasma and deposition rate in pulsed-DC magnetron sputtering sourcelink

인정환; In, Jeong-hwan; 장홍영; Chang, Hong-young, 한국과학기술원, 2009

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