Design of a Dual Servo XYtheta Stage using double H frame

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dc.contributor.authorK.H.Kim-
dc.contributor.authorM.G.Lee-
dc.contributor.authorGweon, Dae-Gab-
dc.date.accessioned2011-07-04T05:20:08Z-
dc.date.available2011-07-04T05:20:08Z-
dc.date.created2012-02-06-
dc.date.issued2002-
dc.identifier.citationASPE 2002 Anual meeting, v., no., pp.199 - 203-
dc.identifier.urihttp://hdl.handle.net/10203/24370-
dc.languageENG-
dc.language.isoen_USen
dc.titleDesign of a Dual Servo XYtheta Stage using double H frame-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage199-
dc.citation.endingpage203-
dc.citation.publicationnameASPE 2002 Anual meeting-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorGweon, Dae-Gab-
dc.contributor.nonIdAuthorK.H.Kim-
dc.contributor.nonIdAuthorM.G.Lee-

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