Browse "RIMS Collection" by Author PAEK, MC

Showing results 1 to 3 of 3

1
A STUDY OF LATTICE DAMAGE IN SILICON INDUCED BY BF2+ ION-IMPLANTATION

PAEK, MC; KWON, OJ; Lee, JeongYong; Lim, Ho Bin, JOURNAL OF APPLIED PHYSICS, v.70, no.8, pp.4176 - 4180, 1991-10

2
EFFECT OF LATTICE DAMAGE ON IMPURITY DEPTH PROFILES IN BF2+-IMPLANTED SILICON

PAEK, MC; Lim, Ho Bin; KWON, OJ; KANG, SW, SURFACE & COATINGS TECHNOLOGY, v.43, no.1-3, pp.986 - 995, 1990-12

3
EFFECTS OF ANNEALING ON THE DAMAGE MORPHOLOGIES IN BF2+ ION-IMPLANTED (100)SILICON

PAEK, MC; Lim, Ho Bin; Lee, JeongYong, JOURNAL OF MATERIALS SCIENCE, v.26, no.10, pp.2603 - 2607, 1991-05

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