A STUDY OF LATTICE DAMAGE IN SILICON INDUCED BY BF2+ ION-IMPLANTATION

Cited 2 time in webofscience Cited 0 time in scopus
  • Hit : 324
  • Download : 0
Lattice damages induced by BF2+ ion implantation in single-crystalline silicon have been analyzed using secondary-ion mass spectrometry, ion channeling technique in Rutherford backscattering spectroscopy, and transmission electron microscopy. Concentration depth profiles of boron and fluorine showed the same values of projection range 400 angstrom at all doses for 50-keV energy. A considerable amount of damage was formed in the silicon lattice and the surface region of the substrate was amorphized when the dosage exceeded a critical value, which was determined to be 8.0 x 10(14)/cm2 experimental dose. The amorphized layer showed a clear boundary to the crystalline silicon, which contains severly damaged regions identified to be microamorphous clusters. He2+ ion channeling data revealed that the integrated damage in implanted layers increases linearly with dosage up to the critical dose and increases with a much smaller rate with further increase in the dosage. It is suggested that the integrated damage shows a smaller damage rate once the surface was amorphized because there can be no further increase of lattice damage in the amorphous layer. The calculated values of the integrated damage based on a model for damage formation agree well with the measured ones.
Publisher
AMER INST PHYSICS
Issue Date
1991-10
Language
English
Article Type
Article
Keywords

TRANSMISSION ELECTRON-MICROSCOPE; BF2+-IMPLANTED SILICON; RESIDUAL DEFECTS; BORON; JUNCTIONS; FLUORINE; (001)SI; SI

Citation

JOURNAL OF APPLIED PHYSICS, v.70, no.8, pp.4176 - 4180

ISSN
0021-8979
URI
http://hdl.handle.net/10203/67368
Appears in Collection
MS-Journal Papers(저널논문)RIMS Journal Papers
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 2 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0