고온 공정이 가능한 ＭＥＭＳ 디바이스 제조방법Method of fabricating MEMS devivce at high temperature process
- Assignee
- 한국과학기술원
- Country
- KO (South Korea)
- Issue Date
- 2014-06-11
- Application Date
- 2013-03-14
- Application Number
- 10-2013-0027539
- Registration Date
- 2014-06-11
- Registration Number
- 10-1408904-0000
- Appears in Collection
- EE-Patent(특허)
- Files in This Item
- There are no files associated with this item.
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