고온 공정이 가능한 ＭＥＭＳ 디바이스 제조방법Method of fabricating MEMS devivce at high temperature process
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 임성규 | ko |
| dc.contributor.author | 김영수 | ko |
| dc.contributor.author | 이귀로 | ko |
| dc.date.accessioned | 2017-12-20T10:59:30Z | - |
| dc.date.available | 2017-12-20T10:59:30Z | - |
| dc.date.issued | 2014-06-11 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/233203 | - |
| dc.title | 고온 공정이 가능한 ＭＥＭＳ 디바이스 제조방법 | - |
| dc.title.alternative | Method of fabricating MEMS devivce at high temperature process | - |
| dc.type | Patent | - |
| dc.type.rims | PAT | - |
| dc.contributor.localauthor | 이귀로 | - |
| dc.contributor.nonIdAuthor | 임성규 | - |
| dc.contributor.nonIdAuthor | 김영수 | - |
| dc.contributor.assignee | 한국과학기술원 | - |
| dc.identifier.iprsType | 특허 | - |
| dc.identifier.patentApplicationNumber | 10-2013-0027539 | - |
| dc.identifier.patentRegistrationNumber | 10-1408904-0000 | - |
| dc.date.application | 2013-03-14 | - |
| dc.date.registration | 2014-06-11 | - |
| dc.publisher.country | KO | - |
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