유도 결합형 플라즈마를 생성하기 위한 안테나 장치Antenna device for generating inductively coupled plasma
- Assignee
- KAIST
- Country
- US (United States)
- Issue Date
- 2001-09-11
- Application Date
- 2000-05-02
- Application Number
- 09/562902
- Registration Date
- 2001-09-11
- Registration Number
- 6288493
- Appears in Collection
- PH-Patent(특허)
- Files in This Item
- There are no files associated with this item.
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