유도 결합형 플라즈마를 생성하기 위한 안테나 장치Antenna device for generating inductively coupled plasma
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 장홍영 | ko |
| dc.contributor.author | 이용관 | ko |
| dc.contributor.author | 윤남식 | ko |
| dc.contributor.author | 김성식 | ko |
| dc.contributor.author | 이평우 | ko |
| dc.date.accessioned | 2017-12-20T08:47:50Z | - |
| dc.date.available | 2017-12-20T08:47:50Z | - |
| dc.date.issued | 2001-09-11 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/231951 | - |
| dc.title | 유도 결합형 플라즈마를 생성하기 위한 안테나 장치 | - |
| dc.title.alternative | Antenna device for generating inductively coupled plasma | - |
| dc.type | Patent | - |
| dc.type.rims | PAT | - |
| dc.contributor.localauthor | 장홍영 | - |
| dc.contributor.nonIdAuthor | 이용관 | - |
| dc.contributor.nonIdAuthor | 윤남식 | - |
| dc.contributor.nonIdAuthor | 김성식 | - |
| dc.contributor.nonIdAuthor | 이평우 | - |
| dc.contributor.assignee | KAIST | - |
| dc.identifier.iprsType | 특허 | - |
| dc.identifier.patentApplicationNumber | 09/562902 | - |
| dc.identifier.patentRegistrationNumber | 6288493 | - |
| dc.date.application | 2000-05-02 | - |
| dc.date.registration | 2001-09-11 | - |
| dc.publisher.country | US | - |
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