Polymer/ceramic composite paste for embedded capacitor and method for fabricating capacitor using same동일한 것을 사용해 패브리케이팅 커패시터를 위한 내장형 커패시터와 방법을 위한 고분자/세라믹 복합 페이스트

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A polymer/ceramic composite paste for an embedded capacitor includes an organic solvent, a ceramic powder having a particle diameter of not more than 20 μm dispersed in the organic solvent, a polymer and a hardener. The use of the polymer/ceramic composite paste enables the formation of a dielectric layer having a high dielectric constant. The polymer/ceramic composite paste can be applied by a screen printing technique and is planarized to locally form a polymer/ceramic composite dielectric layer having a thickness of, e.g., up to 20 μm on a desired region. Accordingly, electrical parasitics resulting from the formation of a capacitor on unwanted regions can be reduced, and the capacitance error can be reduced.
Assignee
KAIST
Country
US (United States)
Issue Date
2008-06-03
Application Date
2004-08-18
Application Number
10920456
Registration Date
2008-06-03
Registration Number
07381468
URI
http://hdl.handle.net/10203/229305
Appears in Collection
MS-Patent(특허)
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