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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Effects of ECR N2O-plasma nitridation on thermal oxide characteristics Lee Jin-Woo; Lee Jung-Yeal; Choi Deuk-Sung; Hur Sung-Hoi; Kim, Choong Ki; Han Chul-Hi, Proceedings of the 1995 MRS Spring Meeting, v.391, pp.143 - 148, 1995-04-17 |
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