Effects of ECR N2O-plasma nitridation on thermal oxide characteristics
- Issue Date
- 1995-04-17
- Language
- ENG
- Citation
Proceedings of the 1995 MRS Spring Meeting, v.391, pp.143 - 148
- ISSN
- 0272-9172
- Appears in Collection
- RIMS Conference Papers
- Files in This Item
- There are no files associated with this item.
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