Browse "RIMS Conference Papers" by Author 58
Showing results 6 to 18 of 18
| Effects of ECR N2O-plasma nitridation on thermal oxide characteristics Lee Jin-Woo; Lee Jung-Yeal; Choi Deuk-Sung; Hur Sung-Hoi; Kim, Choong Ki; Han Chul-Hi, Proceedings of the 1995 MRS Spring Meeting, v.391, pp.143 - 148, 1995-04-17 |
| Formation of Arbitrary Shaped Hole in Silicon Substrate Kim, Choong Ki; Chul-Hi Han, International society of electrochemistry, 1995 |
| Hydrogenation Mechanism of Top-Gated Polysilicon Thin Film Transistors Kim, Choong Ki; Chul-Hi Han, MRS spring Meeting, 1994 |
| Hydrogenation of polysilicon thin film transistors using inductively coupled plasma Kim, Choong Ki; Chul-Hi Han, International Conference on Solid State Device and Materials, pp.659 - 661, 1995 |
| Low Temperature Polysilicon TFT's with ECR plasma thermal oxide using Si2H6 source gas for active polysilicon film Kim, Choong Ki; Chul-Hi Han, 2nd International Semiconductor Device Research Symposium, 1994 |
| Model for the frequency dependence of charge pumping current in polycrystalline silicon thin film transistor Lee Ga-Won; Lee Jung-Yeal; Choi Deuk-Sung; Hur Sung-Hoi; Kim, Choong Ki; Han Chul-Hi, Proceedings of the 1995 MRS Spring Meeting, v.378, pp.761 - 766, 1995-04-17 |
| Suppression of Leakage Current in Polysilicon NMOS Thin Film Transistors Using NH3 Annealing Kim, Choong Ki; Chul-Hi Han, International Conference on Solid State Device and Materials, 1994 |
| Two Layer Gate Insulator with ECR Plasma Thermal Oxide/LPCVD Oxide for High Performance Polysilicon Thin Film Transistor 김충기; 한철희, International Conference on VLSI and CAD, pp.106 - 109, 1993 |
| Uniform and Simultaneous Fabrication of High-Precision and High-Density Nozzles, Channels, and Cavities for Inkjet Printheads Yoon, Jun-Bo; Kim, Choong Ki; Yoon, Euisik; Han, Chul-Hi, Proceedings of the SPIE symposium on Micromachining and Microfabrication: Materials and Device Characterization in micromachining, v.3511, pp.214 - 224, 1998-09 |
| 고해상도 투과성 AM-LCD를 위한 실리콘 기판의 연구 김충기; 윤준보; 이호준; 한철희, 한국반도체학술대회, pp.313 - 314, 1995 |
| 보호링을 사용하여 부정합 전위의 발생을 억제한 P/P+ 실리콘기판에 제작된 MOSFET의 특성 분석 김충기; 윤난영; 이호준; 한철희, 한국반도체 대한전자공학회 학술대회, pp.129 - 130, 1995 |
| 부정합 전위가 제기된 Heavily Boron-doped 실리콘 Membrane의 기계적 성질 김충기; 이호준; 한철희, 한국반도체 대한전자공학회 학술대회 논문집, pp.399 - 400, 1994 |
| 자동정렬 특성을 갖는 새로운 실리콘 식각 방법 김충기; 한철희, 대한전기학회 전기재료연구회 학술발표대회, 1995 |
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