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High-Resolution and Low-cost Ag photomask Fabrication by Using Laser Direct Patterning Method Yang, Min-Yang; Youn, Jin-Ho; Park, Jung-Hwan; Kang, Bong-Chul, ICMTE(International Conference of Manufacturing Technology Engineers) 2012, Seoul, Korea, 한국생산제조시스템학회, 2012-10 |
레이저 응용 은 포토마스크 제조 및 병렬공정을 이용한 미세 전극 제조에 관한 연구 = A study on laser applied fabrication of ag photomask and fine electrodes using parallel processlink 윤진호; Youn, Jin-Ho; et al, 한국과학기술원, 2013 |
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