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Fabrication of nano-gap electrode pairs using atomic-layer-deposited sacrificial layer and shadow deposition Park, CW; Lim, JW; Yu, HY; Pi, UH; Ryu, MK; Choi, Sung-Yool, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v.45, pp.4293 - 4295, 2006-05 |
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