Browse "School of Electrical Engineering(전기및전자공학부)" by Author Nga, YA
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| Impact of nitrogen implantation into polysilicon followed by drive-in process on gate oxide integrity Cho, Byung Jin; Ko, LH; Nga, YA; Chan, LH, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.146, no.11, pp.4259 - 4262, 1999-11 |
| Investigation of the gate oxide integrity of the nitrided gate oxide using nitrogen implantation into polysilicon gate Cho, Byung Jin; Ko, LH; Nga, YA; Chan, LH, Abstract Proc. of the Asia-Pacific SIA'98 Conf., pp.0 - 0, 1998-11-30 |
| The effect of nitrogen incorporation into the gate oxide by using shallow implantation of nitrogen and drive-in process Cho, Byung Jin; Ko, LH; Nga, YA; Chan, LH, Proc. of 1998 IEEE Hong Kong Electron Devices Meeting, pp.32 - 32, 1998-08-29 |
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