학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 2014.2, [ v, 60 p. ]
MEMS; 3차원; 마이크로머시닝; 지렛대구조; 메모리효과; 크립; Plastic Deformation; Creep; memory effect; levering structure; Micromachining; 3d; 멤스; 영구변형
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