Asymmetric optical microstructures driven by geometry-guided resist reflow

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We report a new method, termed geometry-guided resist reflow, for the batch fabrication of asymmetric optical microstructures. Thermoplastic microstructures reflow along the geometric boundaries of the adjacent thermoset microstructures above the glass transition temperature of thermoplastic resin. The shape profiles can be freely formed as a concave, convex, or linear shape and the slope angle can also be tuned from 7 to 68 degrees, depending on the geometric parameters. This new method provides a new route for developing functional optical elements.
Publisher
OPTICAL SOC AMER
Issue Date
2014-09
Language
English
Article Type
Article
Citation

OPTICS EXPRESS, v.22, no.18, pp.22089 - 22094

ISSN
1094-4087
DOI
10.1364/OE.22.022089
URI
http://hdl.handle.net/10203/191091
Appears in Collection
BiS-Journal Papers(저널논문)
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