Asymmetric optical microstructures driven by geometry-guided resist reflow

Abstract

We report a new method, termed geometry-guided resist reflow, for the batch fabrication of asymmetric optical microstructures. Thermoplastic microstructures reflow along the geometric boundaries of the adjacent thermoset microstructures above the glass transition temperature of thermoplastic resin. The shape profiles can be freely formed as a concave, convex, or linear shape and the slope angle can also be tuned from 7 to 68 degrees, depending on the geometric parameters. This new method provides a new route for developing functional optical elements.