Diameter control of an extremely thin cylindrical microprobe by electrochemical etching
Electrochemical etching is shown to produce slender cylindrical tungsten probes used as microelectrodes for micromachining or in electrochemical studies. A mathematical model is derived for diameter control of the microprobes and its validation is investigated through experiments. (C) 2000 American Institute of Physics. [S0034-6748(00)03405-5].
- Publisher
- AMER INST PHYSICS
- Issue Date
- 2000-05
- Language
- English
- Article Type
- Article
- Citation
REVIEW OF SCIENTIFIC INSTRUMENTS, v.71, no.5, pp.2166 - 2168
- ISSN
- 0034-6748
- Appears in Collection
- ME-Journal Papers(저널논문)
- Files in This Item
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