Transmission electron microscopy study of $ZnO/Al_{2}O_{3}$ based thin film transistor grown by atomic layer deposition methodALD 방법으로 증착된 $ZnO/Al_{2}O_{3}$ 기반 박막형 트랜지스터의 투과전자현미경 연구
- Advisors
- Lee, Jeong-Yongresearcher; 이 정 용
- Description
- 한국과학기술원 : 신소재공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2011
- Identifier
- 482603/325007 / 020075155
- Language
- eng
- Description
학위논문(박사) - 한국과학기술원 : 신소재공학과, 2011.8, [ xii, 158 p. ]
- Keywords
ZnO; atomic layer deposition; high-k dielectric material; ZnAl2O4; 원자층증착법; ZnO; 고유전율재료; ZnAl2O4; 박막형 트랜지스터; thin film transistor
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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