Transmission electron microscopy study of $ZnO/Al_{2}O_{3}$ based thin film transistor grown by atomic layer deposition methodALD 방법으로 증착된 $ZnO/Al_{2}O_{3}$ 기반 박막형 트랜지스터의 투과전자현미경 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | Lee, Jeong-Yong | - |
| dc.contributor.advisor | 이 정 용 | - |
| dc.contributor.author | Jang, Yong-Woon | - |
| dc.contributor.author | 장용운 | - |
| dc.date.accessioned | 2013-09-12T04:42:38Z | - |
| dc.date.available | 2013-09-12T04:42:38Z | - |
| dc.date.issued | 2011 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=482603&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/181956 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 신소재공학과, 2011.8, [ xii, 158 p. ] | - |
| dc.language | eng | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | ZnO | - |
| dc.subject | atomic layer deposition | - |
| dc.subject | high-k dielectric material | - |
| dc.subject | ZnAl2O4 | - |
| dc.subject | 원자층증착법 | - |
| dc.subject | ZnO | - |
| dc.subject | 고유전율재료 | - |
| dc.subject | ZnAl2O4 | - |
| dc.subject | 박막형 트랜지스터 | - |
| dc.subject | thin film transistor | - |
| dc.title | Transmission electron microscopy study of $ZnO/Al_{2}O_{3}$ based thin film transistor grown by atomic layer deposition method | - |
| dc.title.alternative | ALD 방법으로 증착된 $ZnO/Al_{2}O_{3}$ 기반 박막형 트랜지스터의 투과전자현미경 연구 | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 482603/325007 | - |
| dc.description.department | 한국과학기술원 : 신소재공학과, | - |
| dc.identifier.uid | 020075155 | - |
| dc.contributor.localauthor | Lee, Jeong-Yong | - |
| dc.contributor.localauthor | 이 정 용 | - |
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.