Development of a Novel Biosensing Mechanism by Using Electrostatic MEMS Actuator정전구동식 미세전자기계시스템 구동기를 이용한 새로운 생체물질 검출 방법의 개발
- Advisors
- Yoon, Jun-Boresearcher; 윤준보
- Description
- 한국과학기술원 : 전기 및 전자공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2011
- Identifier
- 482814/325007 / 020094288
- Language
- eng
- Description
학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 2011.8, [ iv, 59 p. ]
- Keywords
MEMS; biosensor; electrostatic actuator; 미소전자기계시스템; 바이오센서; 정전구동기; 구동전압; pull-in voltage
- Appears in Collection
- EE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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