Showing results 1 to 4 of 4
DLI-MOCVD법을 이용한 Pb계 강유전체 박막의 저온 증착 = Low temperature metalorganic chemical vapor deposition of Pb-based ferroelectric thin films using direct liquid injection systemslink 변경문; Byun, Kyung-Mun; et al, 한국과학기술원, 2004 |
ECR PECVD법을 이용한 SiOF 박막의 증착 특성 및 유전율 안정화에 관한 연구 = A study on the deposition characteristics and the dielectric stability of the SiOF films deposited by ECR PECVDlink 변경문; Byun, Kyung-Mun; et al, 한국과학기술원, 1999 |
Effects of pulsed plasma on low temperature growth of Pb-based ferroelectric films in direct liquid injection metalorganic chemical vapor deposition Byun, Kyung-Mun; Lee, Won-Jong, CURRENT APPLIED PHYSICS, v.7, no.2, pp.113 - 117, 2007-02 |
Theoretical Composition Calibration and Thickness Measurement in the Analysis of Multielement Thin Films Using Wavelength Dispersive Spectroscopy: Applications to Lead Zirconate Titanate Thin Films Byun, Kyung-Mun; Kim, Jae-Whan; Lee, Won-Jong, Japanese Journal of Applied Physics, Vol.36, pp.L1242-L1245, 1997-09-15 |
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