Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Subject MAGNETRON
Showing results 1 to 3 of 3
| ORIGIN OF INTRINSIC STRESS IN Y2O3 FILMS DEPOSITED BY REACTIVE SPUTTERING CHOI, HM; Choi, Si-Kyung, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.13, no.6, pp.2832 - 2835, 1995-11 |
| Structure and electrical properties of Pb(ZrxTi1-x)O-3 deposited on textured Pt thin films Hong, Jong In; Song, Han Wook; Lee, Hee Chul; Lee, Won-Jong; No, Kwangsoo, JOURNAL OF APPLIED PHYSICS, v.90, no.4, pp.1962 - 1967, 2001-08 |
| 대면적 평면 마그네트론 스퍼터링 시스템의 플라즈마 발생 및 박막증착에 관한 수치적 연구 = A computational study on plasma generation and film deposition in a large-area planar magnetron sputtering systemlink 권의희; Kwon, Ui-Hui; et al, 한국과학기술원, 2004 |
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