대면적 평면 마그네트론 스퍼터링 시스템의 플라즈마 발생 및 박막증착에 관한 수치적 연구 = A computational study on plasma generation and film deposition in a large-area planar magnetron sputtering system

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Advisors
이원종researcherLee, Won-Jongresearcher
Description
한국과학기술원 : 신소재공학과,
Publisher
한국과학기술원
Issue Date
2004
Identifier
237583/325007  / 020005019
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 신소재공학과, 2004.2, [ v, 142 p. ]

Keywords

증착; 플라즈마; 마그네트론; 스퍼터링; 전산모사; SIMULATION; DEPOSITION; PLASMA; MAGNETRON; SPUTTERING

URI
http://hdl.handle.net/10203/49778
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=237583&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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