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CH_3OH 유도결합 플라즈마를 이용한 Magnetic Tunnel Junction 물질의 건식식각특성 연구 = Dry etching characteristics of magnetic tunnel junction materials in CH_3OH inductively coupled plasma systemlink 이민석; Lee, Min-Suk; et al, 한국과학기술원, 2012 |
The effect of substrate temperature on the etching properties and the etched surfaces of magnetic tunnel junction materials in a CH3OH inductively coupled plasma system Lee, Min-Suk; Lee, Won-Jong, APPLIED SURFACE SCIENCE, v.258, no.20, pp.8100 - 8108, 2012-08 |
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