Showing results 1 to 3 of 3
A 3-dimensional model for step coverage by atomic layer deposition in a patterned structure Kim J.-Y.; Kim J.-H.; Ahn J.-H.; Kang S.-W., 208th Meeting of The Electrochemical Society, pp.917 -, 2005-10-16 |
Dielectric properties of SrTiO3 thin films on SrRuO3 seed prepared by plasma-enhanced atomic layer deposition Ahn J.-H.; Kim J.-Y.; Kim J.-H.; Roh J.-S.; Kang S.-W., Physics and Technology of High-k Gate Dielectrics 6 - 214th ECS Meeting, pp.335 - 339, 123, 2008-10-13 |
Preparation and characterization of BST thin films with hybrid bottom electrodes Ahn J.-H.; Park J.-H.; Lee W.-J.; Kim, Ho Gi, Proceedings of the 1997 MRS Fall Symposium, pp.87 - 92, MRS, 1997-11-30 |
Discover