A 3-dimensional model for step coverage by atomic layer deposition in a patterned structure

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Issue Date
2005-10-16
Language
ENG
Citation

208th Meeting of The Electrochemical Society, pp.917 -

ISSN
1091-8213
URI
http://hdl.handle.net/10203/138817
Appears in Collection
MS-Conference Papers(학술회의논문)
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