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Low temperature nucleation of the perovskite phase in the deposition of Pb(Zr,Ti)O-3 films on the Pt/SiO2/Si substrate by electron cyclotron resonance plasma enhanced chemical vapor deposition Kim, Jae Whan; Kim, Hyun Ho; Wee, Dang-Moon; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.36, no.7B, pp.936 - 938, 1997-07 |
RF magnetron sputtering법으로 증착된 PZT 박막의 증착특성 및 광소자로의 응용에 관한 연구 = A study on the deposition characteristics and the application to optical devices of the PZT films deposited by RF magnetron sputteringlink 강희수; Kang, Hee-Soo; et al, 한국과학기술원, 2001 |
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