RF magnetron sputtering법으로 증착된 PZT 박막의 증착특성 및 광소자로의 응용에 관한 연구A study on the deposition characteristics and the application to optical devices of the PZT films deposited by RF magnetron sputtering
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2001
- Identifier
- 169593/325007 / 000965017
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 2001.8, [ vi, 141 p ]
- Keywords
열처리조건; 증착온도; 광도파로; 전광계수; PZT; crack; seed layer; electro-optic coefficient; sputtering
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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