Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Subject inductively coupled plasma
Showing results 4 to 6 of 6
| Reaction characteristics between Cu thin film and RF inductively coupled Cl-2 plasma without/with UV irradiation Kwon, MS; Lee, JeongYong; Choi, KS; Han, CH, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.37, no.7, pp.4103 - 4108, 1998-07 |
| Structure of SiO2 Films Grown at Low Temperature by Inductively Coupled Plasma Oxidation with Oxygen Gas Choi, Yong Woo; Ahn, Jin Hyung; Ahn, Byung Tae, ELECTRONIC MATERIALS LETTERS, v.1, no.2, pp.97 - 102, 2005-12 |
| 유도결합 플라즈마를 이용한 PZT 박막의 건식에칭 특성에 관한 연구 = A study on the etching characteristics of PZT films using Inductively coupled Plasmalink 정진기; Jung, Jin-Ki; et al, 한국과학기술원, 2001 |
Discover
Open Access
Date issued
- 2,164 2020 - 2024
- 6,675 2010 - 2019
- 5,356 2000 - 2009
- 3,582 1990 - 1999
- 982 1980 - 1989