유도결합 플라즈마를 이용한 PZT 박막의 건식에칭 특성에 관한 연구A study on the etching characteristics of PZT films using Inductively coupled Plasma
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2001
- Identifier
- 165735/325007 / 000965828
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 2001.2, [ vi, 91 p. ]
- Keywords
Cl2; PZT; 건식식각; 유도결합 플라즈마; CF4; CF4; Cl2; PZT; dry etching; inductively coupled plasma
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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