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Improvement of morphological stability of PEALD-iridium thin films by adopting two-step annealing process Kim, Sung-Wook; Kwon, Se-Hun; Jeong, Seong-Jun; Park, Jin-Seong; Kang, Sang-Won, ELECTROCHEMICAL AND SOLID STATE LETTERS, v.11, no.11, pp.H303 - H305, 2008-09 |
Ru 전구체의 열분해 메카니즘과 Ru 박막의 화학기상 증착 = Thermal decomposition mechanism of Ru precursor and chemical vapor deposition of Ru filmslink 최종완; Choi, Jong-Wan; et al, 한국과학기술원, 2004 |
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